Submicron resolution X-ray tubes
Submicron resolution tubes manage to achieve resolutions in the range from 0.5 to 15 microns. These tubes feature special diamond-based transmission targets and electron optics with condenser. A special characteristic of the product lines TCNF and TCNF Plus is the internal cooling of the electron optics to stabilize the focal spot position during submicron resolution CT scanning.
Product lines: TC, TCHE, TCHE Plus, TCNF, TCNF Plus
Product lines
Target power | JIMA resolution | 2µm (High resolution) | 0.9µm (Submicron resolution) | 0.5µm (Submicron resolution) |
---|---|---|---|
10 Watt | T | TC | |
25 Watt | THE | TCHE | TCNF |
50 Watt | THE Plus | TCHE Plus | TCNF Plus |
Target power | JIMA resolution | 2µm (High resolution) |
---|---|
10 Watt | T |
25 Watt | THE |
50 Watt | THE Plus |
Target power | JIMA resolution | 0.9µm (Submicron resolution) |
---|---|
10 Watt | TC |
25 Watt | TCHE |
50 Watt | TCHE Plus |
Target power | JIMA resolution | 0.5µm (Submicron resolution) |
---|---|
10 Watt | |
25 Watt | TCNF |
50 Watt | TCNF Plus |
Product line TC

Microfocus X-ray tube XWT-225-TC
Description
Product line TC is recommended for computed tomography (CT) and high resolution inspection (HR) in electronics and medical industry. These X-ray tubes offer a JIMA resolution of 0.9 microns (μm) and three modes of operation. Up to 25 Watt target power are available, using the optional High Energy Target.
Applications
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Highlights
- JIMA resolution 0.9 microns (μm)
- Three modes of operation
- Automatic Intensity Control (AIC) for continuous intensity of radiation
- Automatic tube calibration for optimum performance
- Easy maintenance with adjusted ready-to-use click-in cathodes and automatic tube venting
- Unlimited lifetime
Product line TCHE

Microfocus X-ray tube XWT-225-TCHE
Description
Product line TCHE is recommended for computed tomography (CT), planar computed tomography (PCT), dimensional measurement (DM), and high resolution inspection (HR) in electronics and medical industry.
These X-ray tubes offer a JIMA resolution of 0.9 microns (μm) and three modes of operation.Â
Applications




Highlights
- JIMA resolution 0.9 microns (μm)
- Three modes of operation
- Outstanding 25 Watt target power
- Automatic tube calibration for optimum performance
- Easy maintenance with adjusted ready-to-use click-in cathodes and automatic tube venting
- Unlimited lifetime
Product line TCHE Plus

Microfocus X-ray tube XWT-160-TCHE Plus
Description
Product line TCHE Plus is recommended for computed tomography (CT), planar computed tomography (PCT), dimensional measurement (DM), and high resolution inspection (HR) in electronics and medical industry.
These X-ray tubes offer a JIMA resolution of 0.9 microns (μm) and three modes of operation.Â
Applications




Highlights
- JIMA resolution 0.9 microns (μm)
- Three modes of operation
- Outstanding 50 Watt target power
- Automatic tube calibration for optimum performance
- Easy maintenance with adjusted ready-to-use click-in cathodes and automatic tube venting
- Unlimited lifetime
Product line TCNF

Microfocus X-ray tube XWT-225-TCNF
Description
Product line TCNF, featuring an innovative internal cooling, reducing movement of focal spot by more than 90%, is recommended for computed tomography (CT), metrology (DM), and high resolution (HR) inspection in electronics industry and science.Â
These X-ray tubes have an internal liquid cooling of tube head for permanent stability of focal spot position, a liquid cooling of the turbo pump to avoid vibrations and provide and provide an ultimate JIMA resolution of 0.5 microns (μm) and highest magnification for semiconductor, electronics, and composite applications, featuring the High Resolution Diamond Target.
Applications



Highlights
- Ultimate JIMA resolution and magnification for semiconductor, electronics, and composite applications
- Developed for inline and offline two- and three-dimensional X-ray inspection
- Internal cooling of tube head to stabilize focal spot
position – less than +/- 1μm focal spot movement in laboratory setup - Liquid cooling of turbo pump to avoid vibrations
- Automatic venting valve for long life of vacuum
components
Product line TCNF Plus

Microfocus X-ray tube XWT-160-TCNF Plus
Description
Product line TCNF Plus, featuring an innovative internal cooling, reducing movement of focal spot by more than 90%, is recommended for computed tomography (CT), metrology (DM), and high resolution (HR) inspection in electronics industry and science.Â
These X-ray tubes have an internal liquid cooling of tube head for permanent stability of focal spot position, a liquid cooling of the turbo pump to avoid vibrations and provide and provide an ultimate JIMA resolution of 0.5 microns (μm) and highest magnification for semiconductor, electronics, and composite applications, featuring the High Resolution Diamond Target.
Applications



Highlights
- Ultimate JIMA resolution and magnification for semiconductor, electronics, and composite applications
- Developed for inline and offline two- and three-dimensional X-ray inspection
- Internal cooling of tube head to stabilize focal spot
position – less than +/- 1μm focal spot movement in laboratory setup - Liquid cooling of turbo pump to avoid vibrations
- Automatic venting valve for long life of vacuum
components